Design of a patterned substrate for gas sensor applications

Ghanshyam, C. and Mishra, Sunita and Ram, N. and Singh, Satinder and Bajpai, R.P. and Bedi, R.K. (2002) Design of a patterned substrate for gas sensor applications. Journal of Scientific & Industrial Research, 61 (10). pp. 802-804. ISSN 0022-4456

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Official URL: http://www.niscair.res.in/ScienceCommunication/sci...

Abstract

Gas sensors based on semiconducting oxides can be used for the detection of combustible and noxious gases in air. Their advantages are high sensitivity, simple design, low weight and cost. The basic design of a gas sensorconsists of two essential parts, viz. active layer and a contact array through which the active material can be interrogated. There has been a lot of progress and work was done in the deposition of sensitive active layer by several researchers. However the design of a substrate is equally important and will continue to play an important role on the performance of the sensor .The substrate design, design of the mask, and proposed in-house work are described.

Item Type: Article
Subjects: CSIO > Applied Physics
Depositing User: Ms. Narinder Kaur
Date Deposited: 04 Apr 2012 16:14
Last Modified: 10 Apr 2012 15:49
URI: http://csioir.csio.res.in/id/eprint/179

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