Optimization of polymer coated silicon microcantilever for chemical sensing applications

Ganeshan, M. and Sharma, N.K. and Jain, V.K. (2006) Optimization of polymer coated silicon microcantilever for chemical sensing applications. Indian Journal of Pure and Applied Physics , 44 (5). pp. 407-413. ISSN 0019-5596

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Official URL: http://www.niscair.res.in/sciencecommunication/res...

Abstract

The mechanical design and optimization of polymer coated silicon microcantilever (MC) for chemical sensing application have been studied through simple mass sensitivity factor. For this theoretical modeling, silicon is the base layer (substrate) and the functional layer can be selected according to the chemical detection. The mass sensitivity factor and spring constant change before and after chemical reactions have been analyzed theoretically by taking minimum of four hundred samples in each case study. Finally, the specific dimensions and guidelines for designing high sensitivity polymer coated microcantilever for chemical sensing application based on the case study have been suggested. The optimized microcantilever is theoretically analyzed with detection of water vapour and primary alcohols.

Item Type: Article
Uncontrolled Keywords: Microcantilever ; Resonance frequency ; Mass sensitivity factor ; Spring constant; B81B7/02 ;
Subjects: CSIO > Applied Physics
Depositing User: Ms. J Shrivastav
Date Deposited: 29 Mar 2012 14:47
Last Modified: 29 Mar 2012 14:47
URI: http://csioir.csio.res.in/id/eprint/71

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